In order to create devices like micro-3D cameras and gas sensors for precise air quality measurement, including their use in mobile phones, a team of researchers led by Associate Professor Niels Quack of the University of Sydney has developed a new technology to combine optics and micro-electro mechanical systems (MEMS) in a microchip.
A new, more energy-efficient generation of devices for fiber-optic communications, sensors, and even future quantum computers is made possible by the new microfabrication process, which was published on March 20 in Microsystems and NanoEngineering. It builds on silicon photonics and uses semiconductor manufacturing techniques.
Associate Professor Quack from the School of Aerospace, Mechanical and Mechatronic Engineering said that the photonic MEMS are unique in that they are compact, consume very little power, are fast, support a broad range of optical carrier signals and have low optical loss.
“This is the first time that nano-electro-mechanical actuators have been integrated in a standard silicon photonics technology platform,” Associate Professor Quack said.
“It is an important step towards mature large-scale, reliable photonic circuits with integrated MEMS. This technology is being prepared for high-volume production, with potential applications in 3D imaging for autonomous vehicles or new photonic assisted computing.”
The technology will advance knowledge in the field of micro and nanofabrication, photonics and semiconductors, with a wide range of applications. These include beam steering for LIDAR 3D sensing in autonomous vehicles, programmable photonic chips, or information processing in quantum photonics.
Associate Professor Quack
“Current similar technologies consume a lot of power and occupy a large area on-chip. They also have high optical losses. This makes the integration of a large number of components on a single chip challenging,” he said.
“Our silicon photonic MEMS technology overcomes these shortcomings, providing a route for efficient scaling of photonic integrated circuits.”
“The technology will advance knowledge in the field of micro and nanofabrication, photonics and semiconductors, with a wide range of applications. These include beam steering for LIDAR 3D sensing in autonomous vehicles, programmable photonic chips, or information processing in quantum photonics.”
