The vital purpose of this article is to discuss about MEMS Fabrication. The techniques utilized in MEMS fabrication use from techniques recognized for the included circuit industry, but they have been unlimited to incorporate production of mechanical workings. There are three ingredients in the conventional processing of silicon wafers. These rudiments are statement, etching and lithography. Here explain on Deposition, Etching and Lithography.
MEMS Fabrication Processes
